超硬材料薄膜涂层研究进展及应用

Progress on Superhard Film Coatings and Their Applicalion

CVD和PVDTiN ,TiC ,TiCN ,TiAlN等硬质薄膜涂层材料已经在工具、模具、装饰等行业得到日益广泛的应用 ,但仍然不能满足许多难加工材料 ,如高硅铝合金 ,各种有色金属及其合金 ,工程塑料 ,非金属材料 ,陶瓷 ,复合材料 (特别是金属基和陶瓷基复合材料 )等加工要求。正是这种客观需求导致了诸如金刚石膜、立方氮化硼 (c-BN )和碳氮膜 (CNx)以及纳米复合膜等新型超硬薄膜材料的研究进展。本文对这些超硬材料薄膜的研究现状及工业化应用前景进行了简要的介绍和评述。

Such hard film coatings as TiN,TiC,TiCN,TiAlN,etc.resulted from CVD and PVD have been increasingly extensively applied to such industries as tool,die,decoration and so on,however,can not meet the needs of machining certain materials,such as high silicon aluminum alloy,various nonferrous metals and alloy,engineering plastics,nonmetallic materials,ceramics,composite materials (especially metal-and ceramic-based composite materials),etc.It is the needs that have resulted in progress of research on such new type superhard films as diamond film,cubic boron nitride(C-BN) and carbonitride film(CNx),nano-composite films and so on.The current research situation and commercial application prospect of the above mentioned superhard films have been introduced and evaluateol in this paper.