高精度非球面表面测量技术研究

RESEARCH ON MEASUREMENT OF HIGH-PRECISION ASPHERIC SURFACE

追求更高制造精度一直是制造业的目标,制造精度的提高不但取决于机床、刀具和数控技术,而且取决于制造系统所采用测试手段所能达到的测量精度。在诸多非球面测量方案中,接触式光栅测量技术能够达到相对较高测量精度并具有广泛的适用范围。针对该技术在两个方面提出进一步的改进:第一,把原子力显微镜和用于位移精密测量全息光栅引入非球面制造系统,取代机械测头,以便对该系统所采用测试手段进行改进,进而提高该系统测量精度:原子力显微镜的工作模式采用轻敲模式。第二,全息光栅是光栅制造的最新发展,它的各种指标参数均优于刻划光栅,全息光栅位移精密测量技术也优于传统光栅位移测量技术;为进一步提高非球面表面测量精度,采用全息光栅取代普通光栅实现位移精密测量是非常必要的。

To seek a higher precision in manufacturing is the eternal target. The manufacturing accuracy is not only affected by the factors such as machine, tool, the numerical control technology, but affected by the accuracy of measurement system. Among many measurement technique of aspheric surface, Grating measurement technique with contact sensor has attained higher precision and been applicable to many cases. Two improvement on the technique were put forward: One is that atomic force microscope (AFM) replaced mechanical sensors to improve the measurement accuracy of aspheric surface manufacturing system, which worked in the tapping model. The other is that holographic grating replaced common grating. The properties of holographic grating technology is superior to that of common grating, and displacement-measuring technology with holographic grating is superior to displacement-measuring technology with common grating. Therefore, it is necessary to replace common grating with holographic grating to meet the need of high-precision aspheric surface measurement.