膜厚控制过程中反射颜色变化的计算机模拟

Computer simulation for change of reflected color in film thickness control process

运用递推矩阵法计算了光学多层膜的可见光透射率 ,描绘出可见光频谱的透射率曲线。确定了透射率曲线与 CIE标准色度学系统三刺激值的转化关系 ,进而通过标准三刺激值与计算机 RGB三刺激值的对应转化 ,在计算机上直观模拟出了膜层的颜色随厚度变化的关系。软件的以上功能通过 VC编程实现 ,设定膜层数和厚度等参数之后 ,可以对膜的颜色随厚度变化的关系进行全程模拟 ,并在色度图上标注出对应位置。

Recursive matrix method is introduced in calculating the visible light transmittance of multilayer films so as to plot a transmittance curve in visible spectrum. Determining the conversion relationship between the curve and CIE chromatic tristimulus thresholds the correspondent conversion from the CIE thresholds into computerized RGB tristimulus thresholds is available. Based on it the thickness-dependent color of each and every layer of a film is simulated visually on computer. The functions as above are all implemented via a VC programming. The whole simulation process is thus available to the change of thickness-dependent color if setting up such parameters as the number of layers and their thicknesses, and all the correspondent positions can be marked on chromatic diagram. The rusults show that a new, simple and effective way is developed to cotrol the film thickness in vacuum coating process.