ITO薄膜的制备方法与应用

The Fabrication and Applications of ITO Films

ITO薄膜具有优越的光电性能,在高科技领域中有着重要的用途,如液晶显示、太阳能电池等。磁控溅射法、化学气相沉积(CVD)法、喷雾热分解法、溶胶-凝胶法是目前制备ITO薄膜常用的方法。水热法制备薄膜是近年来发展起来的一种很有潜力的液相制膜技术,具有成膜大面积化、成本低且易于产业化等优点,该法的应用将极大地推动国内制膜技术的发展。

Indium-tin oxide (ITO) films feature good photoelectrical properties and have important applications in such high-technology fields as liquid crystal display, solar cells and so on. Various fabrication techniques for ITO films currently in use, including magnetron sputtering, CVD, spray-pyrolysis, sol-gel, are discussed. Hydrothermal method to prepare films in liquid phase is an attractive technique developed in recent years. It can be easily modified for mass production at a low cost and be obtained over a large area. The application of this method will greatly promote the development of the films technology in China.