摘要
纳米技术在过去的几年里取得了巨大的进展.关注其两个主要方面:纳米级的薄膜润滑与纳米表面改性研究.薄膜润滑(thinfilmlubrication,TFL)的研究进展包括薄膜润滑测试技术、薄膜润滑的膜厚 工况相关特性、机理探索以及数学计算预测模型等方面.介绍了降低极尖沉降(pole tip recession,PTR)的技术,使用含有氮磷的环状化合物———X 1P来提高润滑剂的热稳定性的方法,以及使用纳米粒子的化学机械抛光技术.这些研究成果揭示了现代纳米技术的一些重要特征.
A great improvement in nano technolog y has been witnessed in recent years.Major advances in two branches are discussed here: one is thin film lubrication (TFL) in nano scale and the other is nano-scale surface modification. The advancements of res earches on TFL involve measuring techniques, film versus working parameter relations, mechanism exploration, and predicable numerical models. Surface modification to reduce pole-tip-recession (PTR) is introduced. The usage of a partial fluorinated hexaphenoxy cyclotriphosphazene, X-1P, in improving the thermal stability of the lube, and chemical mechanical polishing p rocess coupled with nano particles are introduced. The results given will provide some insights of the modern nano technology.
出处
《纳米技术与精密工程》
CAS
CSCD
2004年第4期247-256,共10页
Nanotechnology and Precision Engineering
基金
SupportedbyKeyProgramoftheNationalNaturalScienceFoundationofChina(50390060)andCollegeResearchFundofBeijingJiaotongUniversity.