纳焦飞秒激光在有机材料表面刻划微结构光栅的研究

The Study on Machining Microstructure Grating at the Surface of Organic Material with Nanojoule Femtosecond Laser

使用振荡器产生的飞秒激光在透明有机材料PMMA表面进行了刻划微结构光栅的研究.通过理论分析得 到了飞秒激光参数和平台移动速度对线宽的影响,进行了系统的加工实验,加工结果与理论分析基本吻合.在透明有机材料PMMA表面进行了多种光栅的刻划,并对刻划的光栅进行了衍射和色散测试,调整光栅的尺寸和排列方式,得到了形状各异的衍射图案.

Research on ablation with femt os econd laser on the surface of organic material(PMMA) has proceeded. The relation ship between the characters of femtosecond laser, the speed of 3-D stage and th e width of line are obtained by calculation. The ablation experiment is accompli shed. Comparing the experiment result with the calculation, we can get some conc lusions, which are valuable for selecting right characters of laser and speed of stage to get satisfying width of line and continuity. In the experiment, the fe mtosecond laser pulses are directly generated by the Ti∶sapphire oscil lator. Some kinds of microstructure gratings on the surface of PMMA are scored. Different diffraction patterns are presented as a result of different size and a rray of gratings.