摘要
双光子微加工技术是利用材料对飞秒激光束在焦点局部区域发生的双光子吸收现象,并通过逐点扫描来实现微器件三维成型的加工技术.介绍了双光子微加工技术的原理、特点和过程,描述了该加工技术的实验系统,并给出了部分利用该系统获得的初步实验结果,最后简单介绍了双光子微加工技术的一些实际应用.
The two-photon microfabricati on technology employs the two-photon absorption locally induced between the mater ial and the femtosecond laser to achieve 3D shaping through point to point scan. This paper reviews the principle, characterization and process of two-photon m icrofabrication technology,and describes its experimental system simply. Some pr eliminary experimental results obtained with the system are presented as well.Fi nally, some applications of the technology are reported.
出处
《纳米技术与精密工程》
CAS
CSCD
2004年第4期278-283,共6页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(50275029).
