摘要
指出了传统变形镜研究所面临的瓶颈,以及采用MEMS技术研究微变形镜的优点.介绍了利用静电力驱 的平板电容式分立式微变形镜.分析结果表明它具有比传统变形镜更优越的性能.指出了进一步研究与发展MEMS微变形镜还需要解决的若干重要问题.
This paper points out the bott le neck the research of traditional deformable mirror faced and lists some advantag es of micro deformable mirror based MEMS technology. Then the research of micro segmented deformable mirror driven by electrostatics is introduced. Results ind icate that it has more ascendant performance than traditional deformable mirror. At last, this paper points out several important problems need to be solved in order to improve MEMS micro deformable mirror.
出处
《纳米技术与精密工程》
CAS
CSCD
2004年第4期288-293,共6页
Nanotechnology and Precision Engineering
基金
国家自然科学基金重大专项资助项目(90407020).
