摘要
采用磁控溅射设备在玻璃衬底上溅射ZAO/metal/ZAO(ZMZ)结构的多层膜。以Ag作为多层膜结构中的金属膜,测定了在不同Ag膜厚度下,多层膜系的透光率和方电阻,并根据膜系光学原理,对金属层两端的ZAO薄膜的厚度进行了优化设计,改善了多层膜系在可见光区内的光学特性。同时研究了不同衬底温度对多层膜系透光率计导电性能的影响。最终获得方电阻6.5Ω/□,最高透光率达86.14%左右的透明导电薄膜。
ZAO/metal/ZAO (ZMZ) multilayer films were deposited on the glass using DC-magnetron sputtering. Ag film with various thicknesses was used as the metallic layer. The transmittance and conductivity of the multilayer film were measured. By optimization of the thickness of ZAO layers with the computer-aided design, ZMZ multilayer films showed that the optical properties in the visible range of spectrum are improved. A high quality multilayer film with a low sheet resistance of 6.5 Ω/sq and a maximum transmittance of 0.861 was obtained by adjusting the temperature of the substrate while sputtering.
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
2004年第6期811-815,共5页
Acta Energiae Solaris Sinica
关键词
透光率
方电阻
多层膜
磁控溅射
Aluminum
Computer aided design
Electric conductivity
Magnetron sputtering
Multilayers
Optical properties
Optimization
Silver
