新型三极碳纳米管场发射器件的研究

Study on the New Triode Field Emission Display with Carbon Nanotube Cathode

采用催化剂高温分解方法制备了碳纳米管薄膜阴极。利用优质云母板作为绝缘材料,结合简单的丝网印刷工艺制作了新型的栅极结构。详细地给出了新型三极碳纳米管场发射器件的制作工艺,对场致发射的机理进行了初步的讨论。采用这种新型的栅极结构,不仅极大地降低了总体器件成本,同时避免了碳纳米管薄膜阴极的损伤,提高了器件的制作成功率。所制作的三极结构平板场发射器件具有良好的场致发射特性和栅极控制能力。

The carbon-nanotube-film cathode was prepared by a catalytic pyrolysis process. Using the prime mica plate as insulation materials, the new grid structure was fabricated with the simple screen-printing process. The details for the fabrication of the new triode field emission display with carbon nanotube emitters were given and the field emission mechanism was discussed. The rate of successfully fabricating device was improved with the new gate structure, which decreased the device cost and avoided the damage of carbon nanotube cathode. The fabricated triode field emission display possess better electron emission properties and well grid control ability.