摘要
介绍了一种新型结构 CO气敏的半导体薄膜材料——粉末溅射方法制备的表面层掺杂 Sn O2 /Sn O2 ∶ Pt双层膜的气敏特性。分析了双层膜中的导电层厚度对气敏特性的影响 。
The gas sensing characteristics of a new type of semiconductor thin film SnO 2/SnO 2∶Pt double layer thin film were introduced The film was fabricated by powder sputtering using surface-layer doping method The influence of the thickness of the conductance layer on gas sensing properties was investigated The problems related to gas sensing mechanism were discussed
出处
《中国环境监测》
CAS
CSCD
北大核心
2001年第5期46-48,共3页
Environmental Monitoring in China
