探针电流调制法在射频低压等离子体诊断中的应用

Probe-current Modulation Method in the Application to Diagnostics of Low Pressure R. F. Plasma

应用探针电流调制法设计的三探针用于诊断无内电极放电的射频低压等离子体中的电子能量分布函数。测量了氮气等离子体在压强为０．１３～１３Ｐａ时的电子能量分布函数。由此得到的电子平均能量，与由探针Ｖ－Ｉ特性计算得到的电子平均能量相差不超过５％，证明了本测量系统的可靠性。

A measuring system is developed for diagnostics of the electron energy distribution function (EEDF) in an electrodeless low pressure rf discharge by using the probe-current modulation method. The EEDF of a nitrogen plasma in a pressure range of 0.13-13Pa are obtained. The slight difference by no more than 5% between average electron energy calculated from the EEDF and that calculated from the V-I characteristics of the probe seems to constitute indirect evidence in favour of the reliability of the measuring system used.