摘要
以NH3·H2O为催化剂,用正硅酸乙酯(TEOS)溶胶–凝胶工艺制备纳米多孔二氧化硅薄膜.强碱催化使二氧化硅胶粒溶解度增大并增大了体系的离子强度;丙三醇的加入,与水解中间体结合,有效抑制了二氧化硅溶胶胶粒的长大;PVA(聚乙烯醇)对二氧化硅胶粒有强的吸附作用,使胶粒聚联成大的网络结构,增加了成膜性能.通过改变反应物的剂量,调节添加剂的用量,可以制得折射率1.18～1.42,对应孔率60.50%～7.75%并且孔径小于100 nm的纳米多孔二氧化硅薄膜,.单层薄膜厚度在3 μm以内精确可控.
Homogeneous nanoporous silica films were prepared with colloidal silica sol derived by sol-gel technique of tetraethylorthosilicate(TEOS) catalyzed with NH3?H2O. Dense ammonia enhanced the colloidal solubility of silica and ion intensity; glycerol effectively restrained the growth of silica particles; and PVA adhered to silica particles to form a network, which make it easy to prepare silica films. The pore sizes is < 100 nm, the porousity is between 60.50%~7.75%. The refractive indexes of the silica films is between 1.18~1.42 and one layer of the silica films can be adjusted within 3 μm thick.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2005年第2期32-34,37,共4页
Electronic Components And Materials
基金
国家重点基础研究发展计划(No.2002CB613304)
上海市重点学科项目资助
