共面波导结构MEMS滤波器的设计

Design of MEMS Coplanar Waveguide Cavity Bandstop Filter

设计了一种基于共面波导结构的 MEMS 带阻滤波器。利用计算机软件 HFSS 模拟出滤波器的带阻中心频率约为 22 GHz、损耗 19.86 dB、阻带宽度为 5 GHz,而设计大小仅为 1 000 μm×1 100 μm×400 μm。只需改变设计参数,即可获取其它频段的带阻滤波器。该滤波器具有阻带高、插入损耗低、尺寸微小、加工容易等特点。在微尺寸条件下分析了滤波器结构的热应力特性,利用大型有限元软件 ANSYS 模拟表明在–50^+80℃的温度范围内,结构不会产生变形,表明了器件有良好的可靠性。

A bandstop filter of MEMS CPW (coplanar waveguide) cavity was designed. Its performance was achieved by HFSS simulation with 19.86 dB S21 loss at peak transmission of 22 GHz and a broad 5 GHz stop-bandwidth, and its scale is only 1 000 μm×1 100 μm×400 μm. If the design parameters are changed, the other bandstop MEMS filters are obtained. The thermal stress of complex structure was analyzed in condition of microscale, and the filter shows good reliability by ANSYS software simulation in –50 ^+80℃.