摘要
本文阐述了飞秒激光微精细加工技术的原理特点，在微机械和微光学中的应用，及其在加工研究中取得的一些进展；提出一种基于计算机视觉、显微干涉及激光多普勒的MEMS的动态测试技术，实现MEMS器件平面运动幅度的快速测量、平面和离面运动的测量和离面运动的瞬态测量。
The paper set forth femto-second laser micro-machining technology of the principle and characteristics,appli- cations in micro-machine and micro-optics,and its progresses on machining are depicted,testing technology is a key method and very important for the foundational research,The paper shows a MEMS dynamic testing technology based on computer vision,microscopic interferometry and laser Doppler which realize the quick measurement of MEMS in-plane motion s amplitude,the in-plane motion and out-of plane mo...
基金
国家高技术研究发展“863计划”专项经费资助(2004AA404042)
教育部科学技术研究重大项目资助
关键词
飞秒激光
微纳加工
多光子吸收
计算机视觉
相移显微干涉
激光多普勒
MEMS动态测试
femto-second laser
micro-machining
multi-photons absorption
computer vision
phase-stepping microscopic interferometry
laser Doppler
MEMS dynamic testing
