微丝直径激光测量系统的改进及提高精度的研究

Study of amelioration of thread's diameter measurement system and improving precision

提出了以激光为光源的微丝直径测量系统的新方法。就几种影响因素从理论和实验上对激光衍射法测量微丝直径进行了研究,改进测量系统,并以正交CCD组为接收元件。与传统测量方法相比,不再有测量距离的不确定及CCD定位等问题。

A new way of thread's diameter measurement system is introduced, in which laser is used as light source. The system is studied from theory and experiment, ameliorating the system, and using two linear CCD orthogonally as incept element. There is not the question such as indeterminacy and orientation of CCD.