摘要
本文主要介绍了用MEMS技术制造的热式质量流量传感器工作的基本原理,并进行了制造工艺和性能描述以及相关领域的应用。
This paper introduces the basic principle of thermal mass flow sensor which based on Microelectronic Mechanical Systems. This paper also describes its manufacture technology、performance and the application in related fields.
出处
《国外电子测量技术》
2005年第1期49-52,共4页
Foreign Electronic Measurement Technology
