MEMS动态测试中频闪同步控制系统

Stroboscopic Synchronous Control System in MEMS Dynamic Testing

频闪同步控制系统是微机电系统(MEMS)动态测试系统中的重要组成部分.为了满足MEMS发展对测试系统的需求,基于频闪成像技术,设计了一套频闪同步控制系统,用于采集高速运动的MEMS器件的清晰图像.系统采用虚拟仪器方式,通过软件控制波形发生器生成各类逻辑控制信号,驱动CCD摄像机、光源和图像采集卡等设备协调工作.实验表明,测量平面运动时,系统在 50倍放大倍率下,可测器件运动速度达 5. 1m/s,测量分辨率优于180nm,测量重复性为 40nm.

The stroboscopic synchronous control system is an important part of dynamic testing system of micro electro-mechanical systems(MEMS).To satisfy the requirement of MEMS development to testing system, based on techniques of stroboscopic imaging and virtual instruments, a stroboscopic synchronous control system is designed so that the clear images about high-speed microdevice can be captured. When the system is working, its operation software commands waveform generator to create a set of signals and send to other equipments, such as CCD camera, light source, frame grabber and so on. It gives full preparation to extract and analyze dynamic characteristics of MEMS devices. Experiments show that when testing in-plane motion, the resulting velocity limit is 5.1 m/s, measuring resolution is better than 180 nm, and measuring repeatability is 40 nm when the system is magnified 50 times.