三角法光学非接触测量头应用中的关键技术

Key Application Techniques of Optical Triangulation Non-Contact Probes

光学非接触测头在其实际应用中,有一系列问题需要解决.为此,对三角法测量头的灵敏度与特性标定、工件的倾斜与颜色的影响、光束功率与引起的温升、测头的位置找正、测头系统的作用半径标定等应用中的关键技术进行了实验研究,提出了误差补偿、提高调整和标定精度以提高光学非接触测头使用精度的方法.

There are a series of problems to be solved in practical applications of the optical non-contact probes. Therefore, some key application techniques including method for sensitivity calibration and performance test of triangulation probes, influences of surface inclination and its color, optical beam power and the temperature raise caused, technique for probe position alignment, technique for calibrating the effective radius of the probing system, are studied experimentally. Methods for error compensation, alignment and calibration accuracy enhancement to improve the application accuracy of optical non-contact probes are proposed.