多层膜镀制过程中监控片的最优化更换策略

Optimal Chip Changing Tactics in Depositing Process of Multiplayer Optical Coatings

研究了分离法监控多层膜淀积时监控片的更换策略问题。分析了不同的监控片更换策略对所淀积薄膜光学特性的影响,得出了监控片的更换策略也是决定所镀制光学薄膜成功与否的关键因素之一的结论。提出了利用最优化原理和计算机模拟薄膜淀积来确定多层膜镀制过程中监控片的最优化更换策略的新方法,并设计了相关的计算机程序。在基于反射率极值法监控的镀膜机上进行的实验结果表明:用设计的程序可得到一定工艺条件下镀制多层规整膜系时应采取的监控片更换策略。这对于多层膜的实际镀制具有指导意义。

A problem about the chip changing tactics during the depositing process of multiplayer optical coatings that monitoring by separating control technique was investigated.The effect of different chip changing tactics on the optical properties of deposited coating was analyzed.The conclusion was educed that the chip changing tactics is also a key factor to the multiplayer optical coating depositing process.A new way that determines the optimal chip changing tactics by optimization principle and computer simulation is put forward and some relative computer programs are designed.The experimental results,from a coating-depositing machine which takes reflectance turning point monitoring approach,show that this program can search the optimal chip changing tactics and it is of guiding significance to deposit multiplayer optical coatings.