电泳沉积法制备PZT厚膜及其性能

PREPARATION OF PZT THICK FILMS BY ELECTROPHORETIC DEPOSITION AND ITS PROPERTY

用电泳沉积技术制备了约70μm的PZT[Pb(Zr_(0.52)Ti_(0.48))O3]厚膜，分析了zeta电位、粘度及电泳沉积速率对PZT悬浮液的稳定性和电泳沉积质量的影响，并研究了烧结后PZT厚膜的结构和电学性能。实验结果表明：在pH=5.5～6.5时，悬浮液的zeta电位高达50 mV以上，此时悬浮液分散性好、粘度低，有最佳的沉积速率(≈31mg·cm^(-2)·min^(-1))和高达51％的相对沉积密度。在此条件下制备出的PZT膜厚均匀一致，无裂纹，经1 000℃保持30min烧结后，在1 kHz下测量得PZT厚膜的介电常数为1 050，介电损耗约为0.05，饱和极化值为20μC／cm^2，剩余极化值为12.9 μC／cm^2，矫顽场强为10.5 kV／cm。

Uniform lead zirconate titanate [Pb(Zr_(0.52) Ti_(0.48))O_3, PZT] thick films with about 70 μm in thickness were prepared by electrophoretie deposition. The effects of pH value on the stability of PZT suspensions and the quality of PZT films were studied by measuring zeta potential, viscosity and deposition rate. It is found that when the pH value is in the range of 5.5 to 6.5, the suspensions are stable and has lower viscosity. The zeta potential of the suspensions can reach to 50 mV, while the optimum deposition rate of about 31 mg/(cm^2·min^(-1)) and the high relative green density of 51% can be obtained. The PZT thick films prepared are uniform and free of cracks. After sintering at 1000℃ for 30 min, the PZT film is obtained with a dielectric constant of 1050 and a loss tangent of about 0.05 at 1 kHz, a remanent polarization of 12.9 μm/cm^2 and a coercive field of 10.5 kV/cm.