叠层共烧微波介质陶瓷器件的银扩散机理

SILVER DIFFUSION MECHANISM OF MULTILAYER COFIRED MICROWAVE DIELECTRIC CERAMIC COMPONENTS

采用玻璃和氧化物助烧剂在900℃烧结制备了4种不同介电常数的微波介质陶瓷。研究了叠层共烧工艺制备的微波介质陶瓷器件的银扩散机制。结果表明：银扩散现象不仅与陶瓷基料有关，还与引入的助烧剂种类及用量有关。玻璃助烧剂易产生扩散渗银现象，减少玻璃助烧剂用量有利于减轻扩散渗银。在选用的4种陶瓷中，ZnTiO_3和7Li_2O-4Nb_2O_5-6TiO_2(摩尔比)陶瓷扩散渗银现象不明显，采用ZnTiO_3陶瓷制备的滤波器件性能稳定。

Four kinds of different permittivity microwave dielectric ceramics were prepared by glass and oxide aids at 900°C. The silver diffusion mechanism in low temperature cofired microwave dielectric ceramic components fabricated by using multilayer technology was studied. The results show that the silver diffusion is not only decided by the base material, but also decided by the kind of sintering aids and the amount of aids used. It is easy for glass aid to generate the silver diffusion, and the decrease of the amount of glass is favorable for alleviating the silver diffusion. Among the four selected ceramics, silver diffusion of ZnTiO3 and 7Li2O-4Nb2O5-6TiO2 ceramics are not obvious. The performance of filter components using ZnTiO3 ceramics is more steady.