氧化锡和氧化锌双层薄膜的XPS研究

Study on SnO_2 and ZnO Bilayer Thin Films by Way of XPS

用XPS法研究了SnO2 /ZnO及ZnO/SnO2 双层膜中锌和锡的扩散情况 ,结果表明 :锌在SnO2中的扩散比锡在ZnO中的扩散更容易。讨论了锌在SnO2 层中的扩散方式和扩散的结果。在ZnO层留下了较多的氧 ,并使部分的SnO2 还原为SnO。

An investigation on diffusion of Sn and Zn in both SnO 2/ZnO and ZnO/SnO 2 bilayer by way of XPS has been presented in this paper.The experiment results indicat that the diffusion of Zn atoms in SnO 2 layer is much faster than that of Sn atoms in ZnO layer in the SnO 2/ZnO or ZnO/SnO 2 bilayers.The paper dicusses the ways and results of the diffusion of Zn atoms in SnO 2 layer.The experiment shows that there are more Oxygen atoms left in ZnO layer and that part of SnO 2 is reduced to SnO.