离子注入聚醚砜膜的光电特性研究

ELECTRICAL AND OPTICAL PROPERTIES OF POLYETHER SULFONE FILM BY ION EMPLANTATION

用15keV的N+或Ar+注入聚醚砜（PolyetherSulfone简称PES）薄膜，在D＝3×10（16）ions／cm2时，纯PES膜表面电导率提高了五个数量级，掺碘PES膜表面电导率提高了四个数量级。在D＝3×10(16)ions／cm2时，离子注入PES膜的表面电导率已达到半导体水平且在大气中非常稳定。离子注入引起PES膜先吸收率显著增加。

After implanting with 15keV nitrogen or argon ions, surface conductivity changed by 5 order of magnitude into polyether sulfone, and 4 order of magnitude for the iodine doped PES. The surface conductivity of ions implanted PES film have increased to the level of semiconductor at dose 3 × 1016 ions. The conductivity of PES film implanted by ions is stable under exposure to air.Optical absorptivity of ions implanted PES film increased obviously.