摘要
探讨了ＴｉＮ膜的吸附机理、吸附条件以及空余键力在真空镀膜中的应用。介绍了ＴｉＮ膜的特性，制备及应用前景，包括在加硬膜、耐蚀膜、装饰膜、阻挡膜及光学膜等方面的应用。
In this paper the discussions are the absorption mechanism of TiN coating in theory,the function of dangling bonds in the application of vacuum coating,and conditions of chemical absorption.The specific propertyand newl application of TiN coating are given.
出处
《合肥工业大学学报（自然科学版）》
CAS
CSCD
1997年第6期157-160,共4页
Journal of Hefei University of Technology：Natural Science
