摘要
报道了用磁控溅射S枪制备Ti Ni Cu聚光太阳电池电极系统的工艺及性能。测试表明,Ti Ni Cu电极的附着力大于硅片的撕裂强度,接触电阻率低,在320℃下(50ml min^(-1)氮气保护)热处理30min后电极无相互扩散。
A concentrating solar cell's TiNiCu contact deposited by magnetron sputtering S-gun is presented. The performances of the contact are discussed in detail. The experiments show that the contact adhesion is stronger than silicon torn-strength, while contact resistivity is low. The results of Auger electron spectroscopy analysis show no interdiffusion of Ti/Ni/Gu contact in a temperature stress test at 320℃. 50ml min-1 N2 for 30 minutes.
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
1993年第2期151-153,共3页
Acta Energiae Solaris Sinica
关键词
磁控溅射
电极
太阳能电池
Magnetron Sputtering, S-gun, concentrating solar cell, contact manufacture, test
