微形貌光电观测镜的光学系统设计

Optical system design of a microstructure electro-optical endoscope

针对微小面积及“盲孔”底面形貌,提出了一种基于直接成像原理的多功能光电检测系统。主要阐述了其光学系统设计思路,即内窥式镜头与显微系统相结合,观测与微扫描相结合。物镜部分采用内窥式探头,可深入内径 2.5mm 的盲孔内部,数值孔径不受微孔尺寸限制,从而提高了系统分辨力,达到 600lp/mm。利用平行平板光学测微器,寻找和瞄准微孔内观测表面的微小细节,可将±0.1mm 范围内的被观测目标定位到视场中心。

A multi-function electro-optical inspection system based on direct imaging principle is proposed for observation of microstructure or underside micro-pore. The design concept for the optical system, for which the detector and the micro-scanner are combined to form a micro endoscope and visual observation is combined with micro-scanning, is mainly described in the paper. The endoscope type probe is adopted in the objective part and the probe can enter the inside of a pore with an inner diameter of 2.5 mm. The numerical aperture of the objective will not be limited by pore size, the resolving capability of the system is improved to 600 line-pairs per millimeter. A parallel flat scanner is used to search and aim at the micro-details of pore surface. The observed objects can be positioned within a range of ± 0.1 mm at the center of field of view.