枕型二维位置敏感探测器的研制

Preparation of a Pin-Cushion Two-Dimensional Position Sensitive Detector

证明了枕型二维位置敏感探测器设计的基本原理———Gear定理,并推导了适用于枕型二维位置敏感探测器的位置计算公式,此外还提出了枕型二维位置敏感探测器的制作工艺和测试结果。采用集成电路工艺所研制的枕型二维位置敏感探测器(光敏面为8 mm×8 mm)表现出良好的光电特性,当反偏为5 V时其暗电流约为15 nA,峰值时的光谱灵敏度超过了0.6 A/W。在所测量的 75%光敏区域内,均方根位置误差约为 0.135 mm,而以均方根位置误差表示的非线性度在1.1%左右,比四边形二维位置敏感探测器的位置线性度提高了近一个数量级。

The basic design principle of a pin-cushion two-dimensional position sensitive detector (PSD)-Gear's theorem is testified, and the position formula of this type of PSD is derived. Moreover, presented in this paper are the fabrication process and device performance of the pin-cushion PSD. The pin-cushion PSD devices (sensitive area 8 mm × 8 mm) fabricated with IC technology show good optoelectronic properties, excellent position linearity and accuracy. The dark current is 15 nA when the reverse bias is 5 V. The peak sensitivity is over 0. 6 A/W. Within 75% sensitive area, the measured RMS of position error is about 0.135 mm, and its nonlinearity characterized with RMS of position error is around 1.1%, almost improved by one order of magnitude compared with that of the tetra-lateral two-dimensional PSD.