基于Web的键合图法MEMS系统级多能量域仿真平台

Web Based Coupled Energy Domains Simulation Platform of MEMS: A Bond Graph Approach

通过对 MEMS 系统级仿真方法的研究,讨论了运用键合图法进行 MEMS 系统级多能量域仿真的可行性,提出了一种采用键合图/模拟框图混合表示进行 MEMS 动特性仿真的方法,并在该方法的基础上开发了一套基于功率键合图的 MEMS 系统级多能量域仿真软件平台 xj_Bond。同时一个基于键合图多通口场与结型结构的微元件库(包括梁、质量块、连接点、静电叉指等微元件)也在该仿真平台上得以实现,从而更好的支持了 MEMS“Top Down”设计流程,并为系统快速建模提供了方便。最后通过一个多能量域 MEMS 系统仿真实例对该平台的有效性进行了验证。

A Bond-Graph-Based methodology for the system level modeling and simulation of MEMS in coupled-energy domains is presented. To allow the coupled simulation of complex and heterogeneous micro electromechanical systems, a web based simulation platform - xj_Bond was developed to support the tasks. To support MEMS Top-Down design flow and system level rapid modeling, a micro electromechanical components template library including beams, joints, plates masses, electrostatic gaps and etc, was also designed and implemented in this platform on the basis of bond graph multiport field and junction structures. Using a piezoelectric Micro-Hydraulic Transducer (MHT) as an example, the corresponding modeling and simulation process is demonstrated in terms of using this platform.