摘要
介绍了TDL-Ta60型单晶炉的设计思路及工作原理,结合晶体生长的特殊工艺要求,分析了其主要结构及特点。
The paper introduces the design ideas and principium of the Ta60 single crystal growth furnace according to the special technics of crystal' growing, interprets main structure and characteristic of the equipment Ta60.
出处
《电子工业专用设备》
2005年第1期71-74,共4页
Equipment for Electronic Products Manufacturing
关键词
单晶炉
结构
直拉法
线圈升降
the single crystal growth furnace, structure,CZ method,winding ascend
