多孔硅原理与应用

Porous Silicon and Its Applications

多孔硅是一种新形态的硅材料,它的应用领域十分广泛。本文综述介绍了多孔硅的制备和特性,深入分析了多孔硅的形成机制,并简单给出了多孔硅的主要应用。

Porous silicon is a new form of silicon material widely used in semiconductor devices. A review is made on porous silicon. The preparation of the new material and its properties are described. The formation mechanism of porous silicon is also dealt with. Finally,its major applications are briefly introduced.