摘要
本文在简要介绍了电子波的概念之后,讨论了利用电子波原理实现高速半导体器件的可能性和条件。作为一个例子,介绍了电子波衍射晶体管的原理、结构、制造和性能。
A brief introduction to the concept of electron wave is made in the paper. The possibility of the application of the electron wave theory to high speed semiconductor devices and the requirements for it are also discussed. As an example,an electron wave diffraction transistor is presented,including its principle,structure,performance and its fabrication
techniques.
出处
《微电子学》
CAS
CSCD
1993年第6期29-32,共4页
Microelectronics
关键词
电子波器件
微结构
量子干涉效应
Electron wave device, Electron wave dif fraction, Semiconductor microstructure, Quantum interference effect