磁致伸缩微位移工作台的新型定位方法

New Orientation Method of Magnetostrictive Micro-displacement Working Table

稀土超磁致伸缩材料广泛应用于传感器、执行器。本文介绍了我们研制的一种磁致伸缩微位移工作台的结构、运动原理以及新型精密定位控制方法,即电磁式吸紧定位。实验测量微位移最小分辨率达2nm。整个微位移工作台结构简单,位移分辨率高,且能够实现双向可控运动。

Rare-earth giant magnetostrictive material (GMM) is widely used in sensors and executors. This article introduces the structure, motion principle and the new control method of accurate orientation of magneto- strictive micro-displacement working table we developed. The minimum resolution of micro-displacement is 2nm. The working table has a simple structure, high resolution of displacement, and can achieve two-way motion.