摘要
利用金属铂的热阻、热敏特性以及SiO2、SiNx良好的绝热绝缘特性,设计一种以金属铂薄层为加热器,叉指状金薄层为信号电极,SiO2和SiNx为隔热和电绝缘层的硅基微结构气敏元件。利用有限元分析工具ANSYS,对该硅基微结构气敏元件的加热衬底的温度场进行模拟和分析,根据分析的结果对所设计的气敏元件优化,优化后的气敏元件热损耗将更小,响应速度将更快。
Considering of the thermal resistant and sensitive characteristics of metal platinum,as well as the heat and electricity insulating characteristics of SiO2 and SiNx,a kind of the Si-substrated micro-structural gas sensor was designed.And platinum filament was used as heater,and gold electrodes with crossing fingers shape were used as sensitive film electrodes,including SiO2 and SiNx was used as thermal and electricity insulation respectively.Then the temperature distribution of the Si-substrated micro structural gas sensor was simulated and analyzed by the finite element analysis(FEA)tool ANSYS.And in order to make the gas sensor obtain perfect properties of lower power and higher response speed,gas sensor was ameliorated by the result of analysis.
出处
《仪表技术与传感器》
CSCD
北大核心
2005年第2期4-6,共3页
Instrument Technique and Sensor
基金
国家自然科学基金资助项目(60104006)
吉林省科技厅资助项目(20030322)
关键词
微热板
有限元分析
ANSYS
温度场
响应速度
MHP(micro-hearing plate)
FEA(finite element analysis)
ANSYS
Temperature Distributing
Response Speed