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利用有限元分析工具优化设计微气体传感器结构 被引量：4

Optimizing Si-substrated Micro-structural Gas Sensor Structure by Finite Element Analysis(FEA)
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摘要 利用金属铂的热阻、热敏特性以及SiO2、SiNx良好的绝热绝缘特性,设计一种以金属铂薄层为加热器,叉指状金薄层为信号电极,SiO2和SiNx为隔热和电绝缘层的硅基微结构气敏元件。利用有限元分析工具ANSYS,对该硅基微结构气敏元件的加热衬底的温度场进行模拟和分析,根据分析的结果对所设计的气敏元件优化,优化后的气敏元件热损耗将更小,响应速度将更快。 Considering of the thermal resistant and sensitive characteristics of metal platinum,as well as the heat and electricity insulating characteristics of SiO2 and SiNx,a kind of the Si-substrated micro-structural gas sensor was designed.And platinum filament was used as heater,and gold electrodes with crossing fingers shape were used as sensitive film electrodes,including SiO2 and SiNx was used as thermal and electricity insulation respectively.Then the temperature distribution of the Si-substrated micro structural gas sensor was simulated and analyzed by the finite element analysis(FEA)tool ANSYS.And in order to make the gas sensor obtain perfect properties of lower power and higher response speed,gas sensor was ameliorated by the result of analysis.
作者 张彤 李春明 刘丽 徐宝琨
机构地区 吉林大学电子科学与工程学院
出处 《仪表技术与传感器》 CSCD 北大核心 2005年第2期4-6,共3页 Instrument Technique and Sensor
基金 国家自然科学基金资助项目(60104006) 吉林省科技厅资助项目(20030322)
关键词 微热板 有限元分析 ANSYS 温度场 响应速度 MHP(micro-hearing plate) FEA(finite element analysis) ANSYS Temperature Distributing Response Speed
分类号 TP212 [自动化与计算机技术—检测技术与自动化装置]
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参考文献13

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同被引文献33

  • 1张彤,杨广立,李春明,徐宝琨.微结构气体传感器的加热器设计与模拟[J].测控技术,2004,23(5):12-13. 被引量：5
  • 2刘丽,张彤,漆奇,陈维友,徐宝琨.基于La_(0.7)Sr_(0.3)FeO_3的微结构乙醇气体传感器的研制[J].Journal of Semiconductors,2007,28(4):610-613. 被引量：6
  • 3Zhang L, Hu J, et al. Formaldehyde-Sensing Characteristics of Perovskite La0. 68Pb0. 32FeO3 Nano-Materials[J]. Physica B 2005, 370: 259-263.
  • 4Wang Jing, Liu Li, et al. An Enrichment Method to Detect Low Concentration Formaldehyde[J]. Sensors and Actuators B 2008, 134: 1010-1015.
  • 5Xu Jiaqiang, Jia Xiaohua, et al. Selective Detection of HCHO Gas Using Mixed Oxides of ZnO/ZnSnO3 [J]. Sensors and Actuators B, 2007, 120: 694-699.
  • 6Lv Pin, Tang Zhenan, et al. Recognizing Indoor Formaldehyde in Binary Gas Mixtures with a Micro Gas Sensor Array and a Neural Network[J]. Measurement Science and Technology, 2007, 18: 2997-3004.
  • 7Rella R, Serra A, et al. CO Sensing Properties of SnO2 Thin Films Prepared by the Sol-Gel Process[J]. Thin Solid Films, 1997, 304:339-343.
  • 8Liu X M, Wu S L, et al. Characteristics of Nano Ti-doped SnO2 Powders Prepared by Sol-Gel Method[J]. Materials Science and Engineering, 2006, A 426: 274-277.
  • 9Gu Lei, Huang Qing-An, et al. A Novel Capacitive-Type Humidity Sensor Using CMOS Fabrication Technology[J]. Sensors and Actuators B, 2004, 991:491-498.
  • 10HWANG, Woo-Jin, Kyu-Sik Shin, Ji-Hyoung Roh, et al. Development of micro-heaters with optimized temperature compensation design for gas sensors. Sensors,2011,11 ( 3 ) :2580 - 2591.

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仪表技术与传感器
2005年 第2期

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