摘要
本文综述了八十年代末、九十年代初国外先进双极技术的发展动态。对外延基区双极技术,硼硅玻璃自对准双极技术等进行了详细的分析和叙述。
The state-of-the-art of advanced bipolar technologies abroad since the late 80's is reviewed in the paper. Detailed analyses and descriptions are made on the epitaxial base technique and boron silicate glass self-aligned (BSA) bipolar technique.
出处
《微电子学》
CAS
CSCD
1993年第3期9-16,共8页
Microelectronics
关键词
外延基区
自对准技术
双极集成电路
Bipolar technology, Epitaxial base technique. BSA technique
