摘要
真空微电子三极管是近年来兴起与发展的真空微电子学中的一类重要器件。本文从真空微三极管的工作特性出发,分析了这类器件中所需考虑的几何参数和工作特性的关系,并给出了一些理论和实验公式,为今后的设计提供一些参考。
Vacuum microelectronic triodes are one of the most important devices in vacuum microelectronics developed in recent years. Based on the operating properties of the vacuum microtriode, the relationship between the geometric parameters and the operation performances for the device is analyzed in the paper. Both theoretical and experimental formulars are presented, which can be used for references for future design.
出处
《微电子学》
CAS
CSCD
1993年第5期36-39,共4页
Microelectronics
关键词
真空微电子学
场发射
真空三极管
Vacuum microelectronics,Vacuum microtriode,Field emission