摘要
论述了金刚石半导体的优异性能以及它的潜在应用,并介绍了它的制备方法。
The excellent performance of the diamond semiconductors and its applications are described in the paper. Techniques to prepare diamond films are also introduced.
出处
《微电子学》
CAS
CSCD
1993年第5期61-64,共4页
Microelectronics
关键词
金刚石薄膜
电子器件
光电子器件
Diamond film, Electronic devices.Optoelectronic device
