圆片规模集成电路光学互连的实现

The Realizable Methods of Optical Intercomection in Wafer Scale Integration

本文评述了光互连技术在圆片规模集成电路中的应用现状.并据具体的工艺实施指出了存在的问题及将来的解决办法.

The status of optical inter(?)onnection application in WSI today is given in this paper for the first time, and both the problems and the solution are according to pra(?)tical processing steps.