微型MEMS致冷器的研究新动向

Recent Research Progresses of Micro-MEMS Cryogenic Refrigeratory

微机电系统(MEMS)与超大规模集成电路(ULIC)进一步微型化与集成化,急需微型冷却系统对其芯片等进行局部冷却。因此,基于硅微机械加工工艺的微型致冷器被提上研究日程,并有望发展成为无压缩机、无机械部件的新型致冷器。着重介绍了微型MEMS致冷器的国内外研究动向与发展趋势,阐述并分析了几种典型致冷材料与器件的工作原理、技术可行性及应用研究前景。

Due to the farther micromation and integration of MEMS and ULIC, a micro-cryogenic system is in urgent need for the cryogenic refrigeration of their microchips. Thus the micro-cryogenic refrigeratory without compressor and mechanical parts is put forward to study, which is based on the MEMS fabrication technique. The fundamentals, feasibility, prospect of this research field are briefly introduced in this paper.