摘要
建立了真空微镊子吸附物理模型,基于Hamaker3个假设及空隙修正理论,推导出被镊物体分别为球、抛物面体和六面体时微镊子和被镊物体间吸附力的数学模型,经仿真得出吸附力仿真结果,并得到微镊子同被镊物体的间隙为r/2时(r为原子半径),吸附力最大的结论,从而为微镊子结构设计和电路控制提供理论基础。
The vacuum micro-tweezers sticking physical model is found.On the base of the Hamaker three hypothesis and gap revision principle, the sticking force mathematical model of the sphere-plane, paraboloid-plane and plane-plane between the micro-tweezers and body is obtained, and followed the simulation result.The conclusion,in which the best gap between the micro-tweezers and body is the half of the atomic radius, is obtained too.All of them put forward the principle base for micro-tweezers structure design and circuit control.
出处
《压电与声光》
CSCD
北大核心
2005年第1期65-67,共3页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(10476019)
