摘要
本工作研究了在热丝(HF)CVD法生长金刚石薄膜中的热丝技术,给出了一种通常作为热丝的钨丝的实用性预处理方法,并且研究了热丝温度分布对生长膜厚度的影响,发现膜厚分布与基片表面温度分布是一致的。
The hot filament technique of diamond thin films growth by HFCVD have been studied. We have put forward the pre-handle method of the tungsten hot filament. The effect of hot filamtnt temperature distribution on the thickness of deposited films have been discussed, We have discovered that the films thickness distribution is in accordance with the temperaure distribution of substrate surface.
出处
《微细加工技术》
EI
1993年第1期82-85,共4页
Microfabrication Technology
关键词
金刚石
薄膜
热丝
HFCVD法
HFCVD
diamond thin film
hot filament technique
