摘要
用100keV的N^+注入表面镀有TiN的H31钢(0.35C 6Cr 1.5MoV)。背散射(RBS)测量表明,中能氮离子注入能使Fe—TiN界面区的Fe、Ti发生明显的原子混合。镀层横截面的透射电镜(TEM)研究证明,N^+注入不仅消除了镀层中的大颗粒Ti,细化了TiN晶粒,而且使界面区的α—Ti向δ—TiN、εTi_2N混合相转化。最后指出了使镀层磨损性能得到改善的原因。
N+ ions with an energy of lOOkeV have been implanted in TiN layers plated on the H13 steel (0.35C 6Cr 1.5MoV) .The RBS analysis of the TiN layers has illustrated that Fe. Ti atoms mixing on the Fe-TiN interface can be resulted form the ion implantation. The TEM analysis of the cross-section of the implanted layers proved.that N+ implantation can disperse the big Ti grains in the layer, make TiN grains small and also transfer α-Ti into δ-TiN and ε-Ti2N mixing phase. Finally, the mechanism of the improvement of the wear resistance are given.
出处
《微细加工技术》
1993年第1期38-41,共4页
Microfabrication Technology
基金
国家高科技资助的课题
