IBAD技术的开发

THE EXPLOITATION OF IBAD TECHNIQUE

IBAD(离子束辅助淀积)是一种很有潜力的材料表面改性和优质薄膜合成技术。本文在论述它在薄膜科学研究中的特点和应用基础上,提出了IBAD技术的开发方向,给出了利用IBAD—PVD复合镀膜技术进行异质材料界面设计和利用IBAD—PVD复合淀积多层膜技术进行CoSi_2薄膜合成的研究实例。这些研究为合成满足需要的优质薄膜提出了优化的技术路线。

1BAD is a potential technique which can be used in surface modification of materials and synthesis of thin solid films. Based on the analyses of applications and properties of 1BAD film, we submitted the idea of 1BAD exploitation and two examples. The first one is interface design between metal films and substrates of different materials by 1BAD-PVD combined technique. The second one is the synthesis of CoSi2 film obtained by IBAD-multilayer deposition combined technique.