摘要
本文详细讨论了用微细加工技术制作Josephson结的过程以及影响其电学特性的各种因素,用湿法刻蚀技术制备了面积为4×4μm^2的Josephson结,并在4.4K闭循环制冷机上观察到了较为理想的Josephson效应。
The procedure of preparing Josephson tunnel junction with microfabrica-tion is described here,and the various factors which affect the electronic properties of the junctions are analyzed as well.Josephson junctions of 4 X4um2 have been prepared by wet etching and Josephson effect is observed with the aid of 4.4K closed-cyde cryostat.
出处
《微细加工技术》
1993年第3期74-77,共4页
Microfabrication Technology
