摘要
在新型的TITAN离子注入系统中,采用组合阴极的方法,进行了碳—钛离子同步注入试验,对纯铁中的离子注入组织进行了电镜观察研究。碳离子注入形成了粒状的Fe_3C相。
The C-Ti ions simultaneous implantalion with incorporation metals ca-thod was carried out in TITAN ion implantation system.And the microstruc-ture of Fe implanted was observed by TEM. Fe3C phase was formed by C ion implantation and non-equilibrious phases Fe6C2 and Fe2C were formed by C-Ti ions simultaneous implantation.
出处
《微细加工技术》
1993年第3期28-32,共5页
Microfabrication Technology
