摘要
分析了采用滑阀式真空泵直拉单晶炉真空系统的缺点;通过改造真空系统,将水环式真空泵应用在直拉单晶炉设备上,提高了直拉单晶炉的整体性能。
The drawback of rotary piston vacuum pump in the vacuum system of Czochralski (CZ) crystal grower is analyzed. Some technical measures to improve the vacuum system are put forward, hence liquid ring vacuum pump is feasible in the CZ crystal grower, which is conducive to good performance of the CZ crystal grower.
出处
《半导体技术》
CAS
CSCD
北大核心
2005年第3期18-19,31,共3页
Semiconductor Technology
关键词
直拉单晶炉
真空系统
水环式真空泵
Czochralski crystal grower
vacuum system
liquid ring vacuum pump
