激光微加工制作纳米气敏传感器阵列的工艺及特性研究

Experimental Study of the Integrated Nano Gas Sensor Arrays Fabricated by Laser Micro-Machining and Their Corresponding Characteristics

利用脉冲YAG激光微加工方法 ,在三氧化二铝陶瓷基片上一面集成了RuO2 加热器 ,另一面集成了四单元电极制备了纳米气敏传感器阵列。对阵列的加热特性、热响应、温度分布及气敏性能作了深入的探讨。阵列单元平均能耗低于 5 0 0mW、热响应速度小于 2 0s、平面温度梯度小于 5℃ /mm、能充分拾取气敏材料的气敏信息 ,阵列气敏性能稳定性、重现性好。研究表明激光微加工方法制作纳米气敏传感器阵列是一种可控性好、灵活、方便、廉价的制作方法。

Nano gas sensor arrays were manufactured through the pulsed YAG laser micromachining of Al 2O 3 plates. The RuO 2 heater and the electrodes were integrated onto two sides of plates, respectively. Some important characteristics of the arrays, such as the heating properties, the temperature time curve, the temperature distribution on the arrays, the sensitivity of the integrated gas sensor arrays were investigated. The average power consumption per unit, the thermal responsive time, the plane temperature distribution gradient was 500 mW, 20 s,5℃/mm, respctively.The sensitivity of the different arrays was high, stable, and repeatable. The results show that YAG laser micro machining of Al 2O 3 plates used for the manufacture of the gas sensor arrays is easily controllable, flexible, convenient and cheap.