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脉冲真空电弧离子镀沉积类金刚石薄膜的结构和力学性能研究 被引量:1

Structure and mechanical properties of DLC films by pulsed vacuum arc ion deposition
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摘要  利用脉冲真空电弧离子镀技术在3Cr13不锈钢上制备了类金刚石(DLC)薄膜.通过Raman光谱分析了膜的结构特征,采用摩擦磨损试验机测试了薄膜在不同载荷下的摩擦系数,运用划痕仪研究了膜基的结合强度.结果表明:所镀制的薄膜具有典型类金刚石结构特征,膜中ID/IG为1.33;摩擦系数随着载荷的增大而减小,载荷为5N,转速120r/min时的摩擦系数为0.02;Ti过渡层的引入显著地提高了膜基结合力. Diamond_like carbon (DLC) films were prepared on 3Cr13 stainless steel substrates by pulsed vacuum arc ion deposition.The films structure is analyzed by Raman spectroscopy.The friction behaviors of the DLC films sliding against a GCr15 ball at different load were measured on a ball_disk friction and wear tester.The interfacial adhesion was investigated on a scratch tester.It has been found that the DLC films have typical diamond_like characteristics and have good friction_property and wearness behavior.Experiment showed that the friction coefficient decreased as the applied load increased.Moreover,interfacial adhesion was improved remarkably by adding a Ti transfer layer.
作者 周顺 严一心
出处 《西安工业学院学报》 2004年第4期307-310,323,共5页 Journal of Xi'an Institute of Technology
基金 总装‘十五’预研项目(2003KW 09)
关键词 类金刚石薄膜 脉冲电孤 摩擦系数 不锈钢 DLC film pulsed arc friction coefficient stainless steel
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