数字化白光扫描干涉仪的研究

Computerized white light scanning interferometer and the application

研究并设计实现了微形貌测量白光扫描干涉仪系统和光纤偏振耦合点监测白光扫描干涉仪系统。前者采用Mirau相移干涉形式,用压电陶瓷传感器PZT作移项器,主要用于微形貌测量,精度可达nm量级。后者采用光路补偿白光Michelson干涉形式,用格兰棱镜对偏振态进行调整控制,用移动参考臂来补偿由于耦合点所造成的光程差,光纤寄生偏振耦合测试仪的空间分辨率达到50mm,测量范围达到1km,探测灵敏度不小于-80dB(耦合模式与主模式的功率比)。

The instrumentation principles and designing of two kinds of white light scanning interferometer systems are studied. One, based on the two-beam Mirau phase-shifting interferometer and the PZT used as a phase shifter, is developed to measure the micro-profile with nanometer accuracy. The other, employing Michelson interferometer for light path compensation, with the polarization states adjusted and controlled by rotating a Glan prism, and by varying reference arm to compensate the difference of light path induced by polarization coupling point, is developed to measure the position of polarization coupling pointing optical fiber. The results are that the spatial resolution of autoecious Polarization coupling measuring apparatus is 50mm, the measure range is 1km, and the detection sensitivity is better than -80 dB.