电化学加工微电极的工艺研究

An Experimental Study on the Electro Chemical Machining of Microelectrodes

应用电化学加工和金属的弹塑性变形理论 ,通过对铜电极的加工工艺研究 ,提出了一种新的微电极加工方法 ,其设计思路是 ,利用电化学加工的基本理论对微电极工件进行初步加工 ,当直径达到一定尺寸后 ,改变电化学加工的电规则 ,同时对工件施加载荷 ,此时在其加工截面产生明显的弹性和塑性变形 ,最终达到微电极要求的尺寸 ,并经过实验确定了该方法的可行性及其工艺参数。

The paper put forward a new method in the machining of microelectrodes by electro chemical machining and applying elastoplastic deformation. It has been proved that the method can be applied in machining Cu and determining the optimum machining parameters. The process begins by machining the microelectrode with ECM at first, then changing the ECM machining parameters. In the mean time one of the microelectrode ends is pulled with a load, and elastoplastic deformations are produced in the microelectrode and the desired size is reached.